Technical Specifications

Detailed parameters for our primary product lines. We maintain strict adherence to SEMI standards for all geometries.

300mm Prime

  • Orientation <100> ± 1°
  • Resistivity 1-30 Ω·cm
  • TTV < 1.5 µm
  • Surface Polished / Epitaxial

200mm Legacy

  • Orientation <111> / <100>
  • Dopant Boron (P) / Phos (N)
  • Oxygen Content Controlled per Spec
  • Application Power / MEMS

Need Custom Epitaxy?

Our chemical vapor deposition (CVD) reactors are available for custom layer thickness and resistivity profiles tailored to your fab's specific recipe.

Contact Engineering